Cleaning System

UVU-F Type/ Ultrasonic Dry Type Cleaner for Flat Materials
UVU-F Type

Particle Removal Capacity Beyond the Limits

of the Microscopic World.

A patented Ultrasonic Pressure, Vacuum, Ultrasonic Pressure design combined with very high ultrasonic output power provides unparalleled cleaning effectiveness. The new UVU-F is the most effective dry cleaning system available for flat materials.

  1. 100% removal of particles down to 1.6 μm.
  2. The dry cleaning system does not require high cost consumables such as DI water or chemical solvents. Subsequent drying is not required, resulting in decreased process costs.
  3. Non-contact system will not scratch or damage the material.
  4. The closed loop system will not disrupt the air balance in such process area as clean rooms.
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Cleaing Test and Results
The test was conducted in our Class 100 Clean Room.
The test results show that particles of 1.6 μm spacer beads were 100% removed at operating pressure of 14 kPa.
Test details
*Substrate : Glass for LCD (320 mm x 400 mm)
*Particles :
a) 1.6 μm spacer beads (sprayed on dry)
b) glass particles
*Pressure range : 14 kPa
*Clearence between cleaning head and substrate : Approx. 1.5 mm
*Line speed : 100 mm/sec
*Evaluation : Microscopic photos
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